Fiber Optic Ultrasonic Sensor Chip
This fiber-tip ultrasonic sensor features compact dimensions, broad bandwidth, and elevated sensitivity, which demonstrate significant potential for diverse applications in ultrasonic wave-based sensing, imaging, and nondestructive testing. Here, we demonstrate an optomechanical ultrasonic sensor integrated into a photonic platform, which comprises a suspended SiO2 membrane embedded with a high- Q Si3N4 microring resonator. Typically, such sensors rely on optically resonant structures, such as Fabry–Perot cavities, that.
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